Description
HORIBA Digital MFC Controller Model SEF-Z514MGX for Flow …
High-precision digital mass flow control with rapid response and robust communication for critical process gas management.
| Brand | HORIBA |
| Model | SEF-Z514MGX |
| Voltage | 24V DC |
| Country of Origin | Japan |
| Weight | 1.2 kg |
| Dimensions | 120 mm x 80 mm x 60 mm |
| Warranty | 2 years |
| Certifications | CE, RoHS, UL |
| SKU / MPN | SEF-Z514MGX-001 |
| What’s in the box | Digital MFC Controller, User Manual, Mounting Bracket, Connector Kit |
| Flow Range | 0-500 sccm (N2 equivalent) |
| Accuracy | ±1.0% of setpoint (25-100% F.S.) |
| Response Time | < 1 second |
| Operating Temperature | 0°C to 50°C |
| Communication Protocol | RS-485, Modbus RTU |
| Maximum Pressure | 0.5 MPa |
Key benefits: Exceptional accuracy, fast settling time, digital interface for easy integration, compact design, low maintenance.
Typical applications: Semiconductor manufacturing, chemical vapor deposition, gas blending systems, analytical instrumentation.
Order number: HORIBA Digital MFC Controller Model SEF-Z514MGX for Flow …
Lifecycle: Active, with planned support for 10 years
Our Advantages
Exact match for many brands
We make replacements easy with an exact match for almost any brand.
We use OEM catalogs to match your part number
Don't worry about ordering the wrong part by matching your part number with our OEM catalogs.
Competitively priced
Shop with confidence knowing we are offering very competitive pricing!
Orders usually ship the same day
Rest assured your order will arrive as soon as possible knowing we usually ship the same day.
Individually inspected
Before any package is shipped we carefully inspect every product to ensure quality.
Guaranteed for one full year
All of our New Surplus and Reconditioned products come with a 1 year warranty.
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Building a reputation for quality products at a reasonable price. Our inventory is far more extensive than what can be represented on our web site, so please call one of our knowledgeable salesmen with your specific needs.






Richard S. –
Arrived in perfect condition. Ran diagnostics, all outputs nominal.