Description
Seren HR3001
High-power 13.56 MHz RF generator designed for stable, repeatable plasma excitation in demanding industrial process environments
| Brand | Seren |
| Model | HR3001 |
| Voltage | 208-240V AC, 3-phase |
| Country of Origin | Japan |
| Weight | 28 kg |
| Dimensions | 483 x 440 x 178 mm (19″ rack-mountable) |
| Warranty | 6 months |
| Certifications | CE, UL, RoHS, FCC Part 18 |
| SKU / MPN | HR3001 |
| What’s in the box | RF Power Supply unit, AC power cable, RF output connector, user manual, calibration certificate |
| Output Frequency | 13.56 MHz |
| Maximum Output Power | 3000 W (3 kW) |
| Input Voltage | 208-240V AC, 3-phase |
| Cooling Method | Forced air cooling with internal fans |
| RF Output Connector | Type N or 7/16 DIN female |
| Control Interface | Analog, RS-232/485, and 25-pin D-sub I/O |
Key benefits: 3 kW continuous output, precise power regulation, robust thermal management, versatile control interfaces, long service life, easy integration into existing systems
Typical applications: Semiconductor plasma etching, PVD and sputtering deposition, PECVD thin film coating, flat panel display manufacturing, solar cell production, surface treatment
Lifecycle: Used/Refurbished unit, fully tested; original Seren HR-series production spans 2000s-2020s with ongoing support
Our Advantages
Exact match for many brands
We make replacements easy with an exact match for almost any brand.
We use OEM catalogs to match your part number
Don't worry about ordering the wrong part by matching your part number with our OEM catalogs.
Competitively priced
Shop with confidence knowing we are offering very competitive pricing!
Orders usually ship the same day
Rest assured your order will arrive as soon as possible knowing we usually ship the same day.
Individually inspected
Before any package is shipped we carefully inspect every product to ensure quality.
Guaranteed for one full year
All of our New Surplus and Reconditioned products come with a 1 year warranty.
Run Business
Building a reputation for quality products at a reasonable price. Our inventory is far more extensive than what can be represented on our web site, so please call one of our knowledgeable salesmen with your specific needs.
Andrew C. –
The servo amplifier performed well in velocity mode. Documentation was helpful.